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    Effect of Cu at Al grain boundaries on electromigration behavior in Al thin films

    機譯:Al晶界處Cu對Al薄膜電遷移行為的影響

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    Abstract: The distribution of copper in aluminum thin films is examined with respect to how the copper can influence electromigration behavior. Al-Cu thin films annealed in the single phase region, to just below the solvus temperature, have 0-phase Al$-2$/Cu precipitates at the aluminum grain boundaries. The grain boundaries between precipitates are depleted in copper. Al-Cu thin films heat treated at lower temperatures, within the two phase region, also have 0-phase precipitates at the grain boundaries but the aluminum grain boundaries continuously become enriched in copper, perhaps due to the formation of a thin coating of 0-phase at the grain boundary. Here, it is proposed that electromigration behavior of aluminum is improved by adding copper because the 0-phase precipitates may hinder aluminum diffusion along the grain boundaries. It was also found that resistivity of Al-Cu thin films decrease during accelerated electromigration testing prior to failure. Pure Al films did not exhibit this behavior. The decrease in resistivity is attributed to the redistribution of copper from the aluminum grain matrix to the 0-phase precipitates growing at the grain boundaries thereby reducing the number of defects in the microstructure. !41
    機譯:摘要:針對銅如何影響電遷移行為,研究了銅在鋁薄膜中的分布。在單相區中退火至固溶溫度以下的Al-Cu薄膜在鋁晶界處有0相Al $ -2 $ / Cu析出。析出物之間的晶界缺銅。在兩相區域內在較低溫度下進行熱處理的Al-Cu薄膜在晶界處也具有0相析出物,但鋁晶界卻不斷地富集銅,這可能是由于形成了0-相在晶界處。在此,由于0相析出物會阻礙鋁沿著晶界的擴散,因此提出通過添加銅來改善鋁的電遷移行為。還發現在破壞之前的加速電遷移測試期間,Al-Cu薄膜的電阻率降低。純鋁膜沒有表現出這種行為。電阻率的下降歸因于銅從鋁晶粒基體到晶粒邊界處生長的0相析出物的重新分布,從而減少了微結構中的缺陷數量。 !41

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